Effect of N2 concentration on structural, morphological, and optoelectronic properties of Cu3N films fabricated by RF magnetron sputtering for photodetection applications

  1. Rodríguez-Tapiador, M.I.
  2. Mánuel, J.M.
  3. Blanco, E.
  4. Márquez, E.
  5. Gordillo, N.
  6. Sainz, R.
  7. Merino, J.
  8. Fernández, S.
Journal:
Materials Science in Semiconductor Processing

ISSN: 1369-8001

Year of publication: 2025

Volume: 188

Type: Article

DOI: 10.1016/J.MSSP.2024.109176 GOOGLE SCHOLAR