Effect of N2 concentration on structural, morphological, and optoelectronic properties of Cu3N films fabricated by RF magnetron sputtering for photodetection applications
- Rodríguez-Tapiador, M.I.
- Mánuel, J.M.
- Blanco, E.
- Márquez, E.
- Gordillo, N.
- Sainz, R.
- Merino, J.
- Fernández, S.
Journal:
Materials Science in Semiconductor Processing
ISSN: 1369-8001
Year of publication: 2025
Volume: 188
Type: Article