The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates
- Márquez, E.
- Saugar, E.
- Díaz, J.M.
- García-Vázquez, C.
- Fernández-Ruano, S.M.
- Blanco, E.
- Ruiz-Pérez, J.J.
- Minkov, D.A.
Revue:
Journal of Non-Crystalline Solids
ISSN: 0022-3093
Année de publication: 2019
Volumen: 517
Pages: 32-43
Type: Article