Transmission electron microscopy study of simultaneous high-dose C+ + N+ co-implantation into (1 1 1)Si
- Morales, F.M.
- Molina, S.I.
- Ponce, A.
- Araújo, D.
- García, R.
- Barbadillo, L.
- Cervera, M.
- Piqueras, J.
ISSN: 0040-6090
Year of publication: 2003
Volume: 426
Issue: 1-2
Pages: 16-30
Type: Article