Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
- Rouzbahani, R.
- Nicley, S.S.
- Vanpoucke, D.E.P.
- Lloret, F.
- Pobedinskas, P.
- Araujo, D.
- Haenen, K.
Journal:
Carbon
ISSN: 0008-6223
Year of publication: 2021
Volume: 172
Pages: 463-473
Type: Article