Interfacial integrity enhancement of atomic layer deposited alumina on boron doped diamond by surface plasma functionalization

  1. Jaggernauth, A.
  2. Silva, R.M.
  3. Neto, M.A.
  4. Oliveira, F.J.
  5. Bdikin, I.K.
  6. Alegre, M.P.
  7. Gutiérrez, M.
  8. Araújo, D.
  9. Mendes, J.C.
  10. Silva, R.F.
Journal:
Surface and Coatings Technology

ISSN: 0257-8972

Year of publication: 2020

Volume: 397

Type: Article

DOI: 10.1016/J.SURFCOAT.2020.125991 GOOGLE SCHOLAR