Evidence of intrinsic silicon nanostructure formation in SiN matrix deposited by various low temperature CVD techniques
- Lelièvre, J.-F.
- Rodriguez, H.
- Fourmond, E.
- Quoizola, S.
- De La Torre, J.
- Sibai, A.
- Bremond, G.
- Ribeyron, P.-J.
- Loretz, J.-C.
- Araujo, D.
- Lemiti, M.
ISSN: 1862-6351
Argitalpen urtea: 2007
Alea: 4
Zenbakia: 4
Orrialdeak: 1401-1405
Mota: Biltzar ekarpena