Correlation of optical and photoluminescence properties in amorphous SiNx:H thin films deposited by PECVD or UVCVD
- Lelièvre, J.-F.
- De la Torre, J.
- Kaminski, A.
- Bremond, G.
- Lemiti, M.
- El Bouayadi, R.
- Araujo, D.
- Epicier, T.
- Monna, R.
- Pirot, M.
- Ribeyron, P.-J.
- Jaussaud, C.
Journal:
Thin Solid Films
ISSN: 0040-6090
Year of publication: 2006
Volume: 511-512
Pages: 103-107
Type: Article