Structural characterization of high-dose C++N+ ion-implanted (1 1 1) Si

  1. Barbadillo, L.
  2. Hernández, M.J.
  3. Cervera, M.
  4. Rodríguez, P.
  5. Piqueras, J.
  6. Molina, S.I.
  7. Morales, F.M.
  8. Araújo, D.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2001

Volume: 184

Issue: 3

Pages: 361-370

Type: Article

DOI: 10.1016/S0168-583X(01)00783-2 GOOGLE SCHOLAR
Data source: Scopus