Fabrication and characterization of TiN-Ag nano-dice

  1. Kitawaki, Ko.
  2. Kaneko, K.
  3. Inoke, K.
  4. Hernandez-Garrido, J.C.
  5. Midgley, P.A.
  6. Okuyama, H.
  7. Uda, M.
  8. Sakka, Y.
Revue:
Micron

ISSN: 0968-4328

Année de publication: 2009

Volumen: 40

Número: 3

Pages: 308-312

Type: Article

DOI: 10.1016/J.MICRON.2008.11.004 GOOGLE SCHOLAR