Crystalline inclusions formed in C + N + BF2 coimplanted on silicon (111)

  1. Ponce, A.
  2. Morales, F.M.
  3. Molina, S.I.
  4. Barbadillo, L.
  5. Cervera, M.
  6. Hernández, M.J.
  7. Rodríguez, P.
  8. Piqueras, J.
Journal:
Microchimica Acta

ISSN: 0026-3672

Year of publication: 2004

Volume: 145

Issue: 1-4

Pages: 165-169

Type: Conference paper

DOI: 10.1007/S00604-003-0147-5 GOOGLE SCHOLAR
Data source: Scopus