Ion irradiation-induced phase transformation mechanisms in Y 2O3 thin films

  1. Gaboriaud, R.J.
  2. Paumier, F.
  3. Jublot, M.
  4. Lacroix, B.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2013

Volume: 311

Pages: 86-92

Type: Article

DOI: 10.1016/J.NIMB.2013.06.015 GOOGLE SCHOLAR