Fabrication and characterization of planarized carbon nanotube via interconnects

1. Katagiri, M.
2. Wada, M.
3. Ito, B.
4. Yamazaki, Y.
5. Suzuki, M.
6. Kitamura, M.
7. Saito, T.
8. Isobayashi, A.
9. Sakata, A.
10. Sakuma, N.
11. Kajita, A.
12. Sakai, T.