Electrical characterization of phosphorus-doped n-type homoepitaxial diamond layers

  1. Suzuki, M.
  2. Koizumi, S.
  3. Katagiri, M.
  4. Yoshida, H.
  5. Sakuma, N.
  6. Ono, T.
  7. Sakai, T.
Journal:
Diamond and Related Materials

ISSN: 0925-9635

Year of publication: 2004

Volume: 13

Issue: 11-12

Pages: 2037-2040

Type: Conference paper

DOI: 10.1016/J.DIAMOND.2004.06.022 GOOGLE SCHOLAR