Reduction of residual oxygen incorporation and deep levels by substrate misorientation in InGaAlP alloys

  1. Suzuki, M.
  2. Itaya, K.
  3. Nishikawa, Y.
  4. Sugawara, H.
  5. Okajima, M.
Journal:
Journal of Crystal Growth

ISSN: 0022-0248

Year of publication: 1993

Volume: 133

Issue: 3-4

Pages: 303-308

Type: Article

DOI: 10.1016/0022-0248(93)90169-W GOOGLE SCHOLAR