Reduction of residual oxygen incorporation and deep levels by substrate misorientation in InGaAlP alloys
- Suzuki, M.
- Itaya, K.
- Nishikawa, Y.
- Sugawara, H.
- Okajima, M.
ISSN: 0022-0248
Year of publication: 1993
Volume: 133
Issue: 3-4
Pages: 303-308
Type: Article