Quantification of the influence of TEM operation parameters on the error of HREM image matching
- Pizarro, J 1
- Guerrero, E 1
- Galindo, P 1
- Yañez, A 1
- Ben, T 2
- Molina, S I 2
- 1 Departamento de Lenguajes y Sistemas Informáticos, CASEM, Universidad de Cádiz, Facultad de Ciencias, Polígono Río San Pedro s/n, 11510, Puerto Real, Spain
- 2 Departamento de Ciencia de los Materiales e Ing. Metalúrgica y Q, Inorgánica Universidad de Cádiz, Facultad de Ciencias, Polígono Río San Pedro s/n, 11510, Puerto Real, Spain
Editorial: Springer Berlin, Heidelberg
ISBN: 9783540319146
Any de publicació: 2005
Pàgines: 195-198
Tipus: Aportació congrés
Resum
In this paper we describe a pattern recognition system implemented to determine thickness and defocus from HRTEM simulated images. A specific task has been designed to quantify the influence of certain operation parameters of a transmission electron microscope in the global recognition error rate. This influence allows us to estimate human recognition confidence when applying pattern matching to the determination of thickness and defocus from HRTEM maps. The images considered in this task correspond to InP with the sphalerite crystalline structure and were simulated using the EMS computer software package.
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