Bonding process using integrated electrothermal actuators for microfluidic circuit fabrication
- Franco, E.
- Perdigones, F.
- Salvador, B.
- Quero, J.M.
ISSN: 1361-6439, 0960-1317
Year of publication: 2018
Volume: 28
Issue: 7
Type: Article
Journal:
Journal of Micromechanics and Microengineering