Systematic approach for high piezoelectric AlN deposition

1. Nieto Sierra, L.
2. Lloret, F.
3. Gallardo, J.J.
4. García Núñez, C.
5. Pelayo García, M.
6. Alba, G.
7. Gibson, D.
8. Araujo, D.

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DOI: 10.1016/J.JALLCOM.2024.176723 GOOGLE SCHOLAR lock_openOpen access editor HANDLE: https://hdl.handle.net/10498/35812

RODIN. Repositorio Institucional UCA.: lock_openOpen access Handle

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