Systematic approach for high piezoelectric AlN deposition

  1. Nieto Sierra, L.
  2. Lloret, F.
  3. Gallardo, J.J.
  4. García Núñez, C.
  5. Pelayo García, M.
  6. Alba, G.
  7. Gibson, D.
  8. Araujo, D.
Journal:
Journal of Alloys and Compounds

ISSN: 0925-8388

Year of publication: 2024

Volume: 1008

Type: Article

DOI: 10.1016/J.JALLCOM.2024.176723 GOOGLE SCHOLAR lock_openOpen access editor

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