MARIA DEL PILAR
VILLAR CASTRO
Profesora Titular de Universidad
Cardiff University
Cardiff, Reino UnidoPublications en collaboration avec des chercheurs de Cardiff University (2)
2013
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Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM
Microelectronic Engineering, Vol. 112, pp. 193-197
2011
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Fabrication of high frequency SAW resonators using AlN/Diamond/Si technology
IEEE International Ultrasonics Symposium, IUS