The influence of Ar pressure on the structure and optical properties of non-hydrogenated a-Si thin films grown by rf magnetron sputtering onto room-temperature glass substrates

1. Márquez, E.
2. Saugar, E.
3. Díaz, J.M.
4. García-Vázquez, C.
5. Fernández-Ruano, S.M.
6. Blanco, E.
7. Ruiz-Pérez, J.J.
8. Minkov, D.A.