Diamond underlayer microstructure effect on the orientation of AlN piezoelectric layers for high frequency SAW resonators by TEM
- Lloret, F.
- Araújo, D.
- Villar, M.P.
- Rodríguez-Madrid, J.G.
- Iriarte, G.F.
- Williams, O.A.
- Calle, F.
Zeitschrift:
Microelectronic Engineering
ISSN: 0167-9317
Datum der Publikation: 2013
Ausgabe: 112
Seiten: 193-197
Art: Artikel