Evidence of intrinsic silicon nanostructure formation in SiN matrix deposited by various low temperature CVD techniques

1. Lelièvre, J.-F.
2. Rodriguez, H.
3. Fourmond, E.
4. Quoizola, S.
5. De La Torre, J.
6. Sibai, A.
7. Bremond, G.
8. Ribeyron, P.-J.
9. Loretz, J.-C.
10. Araujo, D.
11. Lemiti, M.