Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC

  1. Morales, F.M.
  2. Molina, S.I.
  3. Araújo, D.
  4. Cimalla, V.
  5. Pezoldt, J.
Book Series:
Materials Science Forum

ISSN: 1662-9752,  0255-5476

ISBN: 9780878499205

Year of publication: 2003

Volume: 433-436

Pages: 285-288

Type: Conference paper

DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.433-436.285 GOOGLE SCHOLAR
Data source: Scopus