Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC

  1. Morales, F.M.
  2. Molina, S.I.
  3. Araújo, D.
  4. Cimalla, V.
  5. Pezoldt, J.
Collection de livres:
Materials Science Forum

ISSN: 1662-9752 0255-5476

ISBN: 9780878499205

Année de publication: 2003

Volumen: 433-436

Pages: 285-288

Type: Communication dans un congrès

DOI: 10.4028/WWW.SCIENTIFIC.NET/MSF.433-436.285 GOOGLE SCHOLAR