SiC thin films obtained by Si carbonization

  1. Molina, S.I.
  2. Morales, F.M.
  3. Araújo, D.
Aldizkaria:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Argitalpen urtea: 2001

Alea: 80

Zenbakia: 1-3

Orrialdeak: 342-344

Mota: Artikulua

DOI: 10.1016/S0921-5107(00)00661-9 GOOGLE SCHOLAR
Datuen iturria: Scopus