Comparison of the thickness determined by fresnel contrast and rutherford backscattering spectrometry in ultra-thin layers
- Ponce, A.
- Molina, S.I.
- García-López, J.
- Battistig, G.
Buch:
Microscopy of Semiconducting Materials 2003
ISBN: 9781315895536
Datum der Publikation: 2018
Seiten: 305-308
Art: Buch-Kapitel