Comparison of the thickness determined by fresnel contrast and rutherford backscattering spectrometry in ultra-thin layers
- Ponce, A.
- Molina, S.I.
- García-López, J.
- Battistig, G.
Book:
Microscopy of Semiconducting Materials 2003
ISBN: 9781315895536
Year of publication: 2018
Pages: 305-308
Type: Book chapter