Simulation of quality of SiC/Si interface during MBE deposition of C on Si

  1. Kulikov, D.V.
  2. Schmidt, A.A.
  3. Korolev, S.A.
  4. Morales, F.M.
  5. Stauden, Th.
  6. Trushin, Y.Vu.
  7. Pezoldt, J.
Journal:
Materialwissenschaft und Werkstofftechnik

ISSN: 0933-5137 1521-4052

Year of publication: 2006

Volume: 37

Issue: 11

Pages: 929-932

Type: Article

DOI: 10.1002/MAWE.200600080 GOOGLE SCHOLAR