Fabrication of Optical Multilayer Devices from Porous Silicon Coatings with Closed Porosity by Magnetron Sputtering

  1. Caballero-Hernández, J.
  2. Godinho, V.
  3. Lacroix, B.
  4. Jiménez De Haro, M.C.
  5. Jamon, D.
  6. Fernández, A.
Journal:
ACS Applied Materials and Interfaces

ISSN: 1944-8252 1944-8244

Year of publication: 2015

Volume: 7

Issue: 25

Pages: 13889-13897

Type: Article

DOI: 10.1021/ACSAMI.5B02356 GOOGLE SCHOLAR