STEM-EELS analysis reveals stable high-density He in nanopores of amorphous silicon coatings deposited by magnetron sputtering

  1. Schierholz, R.
  2. Lacroix, B.
  3. Godinho, V.
  4. Caballero-Hernández, J.
  5. Duchamp, M.
  6. Fernández, A.
Zeitschrift:
Nanotechnology

ISSN: 1361-6528 0957-4484

Datum der Publikation: 2015

Ausgabe: 26

Nummer: 7

Art: Artikel

DOI: 10.1088/0957-4484/26/7/075703 GOOGLE SCHOLAR