Nanostructure and Physical Properties Control of Indium Tin Oxide Films Prepared at Room Temperature through Ion Beam Sputtering Deposition at Oblique Angles

1. Lacroix, B.
2. Santos, A.J.
3. Hurand, S.
4. Corvisier, A.
5. Paumier, F.
6. Girardeau, T.
7. Maudet, F.
8. Dupeyrat, C.
9. García, R.
10. Morales, F.M.