Compositional depth profiling analysis of thin and ultrathin multilayer coatings by radio-frequency glow discharge optical emission spectroscopy

  1. Escobar Galindo, R.
  2. Forniés, E.
  3. Albella, J.M.
Revista:
Surface and Coatings Technology

ISSN: 0257-8972

Any de publicació: 2006

Volum: 200

Número: 22-23 SPEC. ISS.

Pàgines: 6185-6189

Tipus: Article

DOI: 10.1016/J.SURFCOAT.2005.11.064 GOOGLE SCHOLAR