Fabrication of 70-nm-diameter carbon nanotube via interconnects by remote plasma-Enhanced chemical vapor deposition and their electrical properties

  1. Katagiri, M.
  2. Yamazaki, Y.
  3. Sakuma, N.
  4. Suzuki, M.
  5. Sakai, T.
  6. Wada, M.
  7. Nakamura, N.
  8. Matsunaga, N.
  9. Sato, S.
  10. Nihei, M.
  11. Awano, Y.
Actes de conférence:
Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009

ISBN: 9781424444939

Année de publication: 2009

Pages: 44-46

Type: Communication dans un congrès

DOI: 10.1109/IITC.2009.5090336 GOOGLE SCHOLAR
La source de données: Scopus