Fabrication of 70-nm-diameter carbon nanotube via interconnects by remote plasma-Enhanced chemical vapor deposition and their electrical properties

  1. Katagiri, M.
  2. Yamazaki, Y.
  3. Sakuma, N.
  4. Suzuki, M.
  5. Sakai, T.
  6. Wada, M.
  7. Nakamura, N.
  8. Matsunaga, N.
  9. Sato, S.
  10. Nihei, M.
  11. Awano, Y.
Actas:
Proceedings of the 2009 IEEE International Interconnect Technology Conference, IITC 2009

ISBN: 9781424444939

Ano de publicación: 2009

Páxinas: 44-46

Tipo: Achega congreso

DOI: 10.1109/IITC.2009.5090336 GOOGLE SCHOLAR
Fonte de datos: Scopus