Effects of growth parameters on oxygen incorporation into ingaalp grown by metalorganic chemical vapor deposition

  1. Nishikawa, Y.
  2. Suzuki, M.
  3. Okajima, M.
Journal:
Japanese Journal of Applied Physics

ISSN: 1347-4065,  0021-4922

Year of publication: 1993

Volume: 32

Issue: 1 S

Pages: 498-501

Type: Article

DOI: 10.1143/JJAP.32.498 GOOGLE SCHOLAR
Data source: Scopus