Fabrication of gas amplification microstructures with SU8 photosensitive epoxy

  1. Key, M.J.
  2. Llobera, A.
  3. Lozano, M.
  4. Ramos-Lerate, I.
  5. Seidemann, V.
Revue:
Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

ISSN: 0168-9002

Année de publication: 2004

Volumen: 525

Número: 1-2

Pages: 49-52

Type: Communication dans un congrès

DOI: 10.1016/J.NIMA.2004.03.023 GOOGLE SCHOLAR