Spectroscopic Ellipsometry Study on Tuning the Electrical and Optical Properties of Zr-Doped ZnO Thin Films Grown by Atomic Layer Deposition

  1. Bohórquez, C.
  2. Bakkali, H.
  3. Delgado, J.J.
  4. Blanco, E.
  5. Herrera, M.
  6. Domínguez, M.
Aldizkaria:
ACS Applied Electronic Materials

ISSN: 2637-6113

Argitalpen urtea: 2022

Alea: 4

Zenbakia: 3

Orrialdeak: 925-935

Mota: Artikulua

DOI: 10.1021/ACSAELM.1C01026 GOOGLE SCHOLAR
Datuen iturria: Scopus