Quantification of the influence of TEM operation parameters on the error of HREM image matching

  1. Pizarro, J 1
  2. Guerrero, E 1
  3. Galindo, P 1
  4. Yañez, A 1
  5. Ben, T 2
  6. Molina, S I 2
  1. 1 Departamento de Lenguajes y Sistemas Informáticos, CASEM, Universidad de Cádiz, Facultad de Ciencias, Polígono Río San Pedro s/n, 11510, Puerto Real, Spain
  2. 2 Departamento de Ciencia de los Materiales e Ing. Metalúrgica y Q, Inorgánica Universidad de Cádiz, Facultad de Ciencias, Polígono Río San Pedro s/n, 11510, Puerto Real, Spain
Actas:
14th Conference, April 11-14, 2005, Oxford, UK

Editorial: Springer Berlin, Heidelberg

ISBN: 9783540319146

Año de publicación: 2005

Páginas: 195-198

Tipo: Aportación congreso

DOI: 10.1007/3-540-31915-8_39 GOOGLE SCHOLAR lock_openAcceso abierto editor

Resumen

In this paper we describe a pattern recognition system implemented to determine thickness and defocus from HRTEM simulated images. A specific task has been designed to quantify the influence of certain operation parameters of a transmission electron microscope in the global recognition error rate. This influence allows us to estimate human recognition confidence when applying pattern matching to the determination of thickness and defocus from HRTEM maps. The images considered in this task correspond to InP with the sphalerite crystalline structure and were simulated using the EMS computer software package.

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