High phosphorous incorporation in (100)-oriented MP CVD diamond growth
- Lloret, F.
- Soto, B.
- Rouzbahani, R.
- Gutiérrez, M.
- Haenen, K.
- Araujo, D.
Journal:
Diamond and Related Materials
ISSN: 0925-9635
Year of publication: 2023
Volume: 133
Type: Article