Microstructural evolution and properties of He-charged a-Si coatings prepared by magnetron sputtering

  1. Godinho, V.
  2. Caballero-Hernández, J.
  3. Lacroix, B.
  4. Ferrer, F.J.
  5. Jamon, D.
  6. Jiménez de Haro, M.C.
  7. Fernández, A.
Aldizkaria:
Applied Surface Science

ISSN: 0169-4332

Argitalpen urtea: 2024

Alea: 643

Mota: Artikulua

DOI: 10.1016/J.APSUSC.2023.158681 GOOGLE SCHOLAR lock_openSarbide irekia editor
Datuen iturria: Scopus