Sputter optimization of AlN on diamond substrates for high frequency SAW resonators

  1. Rodríguez, J.G.
  2. Iriarte, G.F.
  3. Calle, F.
  4. Araujo, D.
  5. Villar, M.P.
  6. Williams, O.A.
Actes:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011

ISBN: 9781424478637

Any de publicació: 2011

Tipus: Aportació congrés

DOI: 10.1109/SCED.2011.5744181 GOOGLE SCHOLAR
Font de les dades: Scopus