Sputter optimization of AlN on diamond substrates for high frequency SAW resonators
- Rodríguez, J.G.
- Iriarte, G.F.
- Calle, F.
- Araujo, D.
- Villar, M.P.
- Williams, O.A.
Actes de conférence:
Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
ISBN: 9781424478637
Année de publication: 2011
Type: Communication dans un congrès