Defect morphology and strain of CVD grown 3C-SiC layers: Effect of the carbonization process
- Méndez, D.
- Aouni, A.
- Morales, F.M.
- Pacheco, F.J.
- Araújo, D.
- Bustarret, E.
- Ferro, G.
- Monteil, Y.
ISSN: 1862-6300, 1862-6319
Year of publication: 2005
Volume: 202
Issue: 4
Pages: 561-565
Type: Conference paper