Spectroscopic ellipsometry study of non-hydrogenated fully amorphous silicon films deposited by room-temperature radio-frequency magnetron sputtering on glass: Influence of the argon pressure
- Márquez, E.
- Blanco, E.
- García-Vázquez, C.
- Díaz, J.M.
- Saugar, E.
Zeitschrift:
Journal of Non-Crystalline Solids
ISSN: 0022-3093
Datum der Publikation: 2020
Ausgabe: 547
Art: Artikel