Spectroscopic ellipsometry study of non-hydrogenated fully amorphous silicon films deposited by room-temperature radio-frequency magnetron sputtering on glass: Influence of the argon pressure
- Márquez, E.
- Blanco, E.
- García-Vázquez, C.
- Díaz, J.M.
- Saugar, E.
Aldizkaria:
Journal of Non-Crystalline Solids
ISSN: 0022-3093
Argitalpen urtea: 2020
Alea: 547
Mota: Artikulua