Spectroscopic ellipsometry study of non-hydrogenated fully amorphous silicon films deposited by room-temperature radio-frequency magnetron sputtering on glass: Influence of the argon pressure

  1. Márquez, E.
  2. Blanco, E.
  3. García-Vázquez, C.
  4. Díaz, J.M.
  5. Saugar, E.
Revue:
Journal of Non-Crystalline Solids

ISSN: 0022-3093

Année de publication: 2020

Volumen: 547

Type: Article

DOI: 10.1016/J.JNONCRYSOL.2020.120305 GOOGLE SCHOLAR