3D characterization and metrology of nanostructures by electron tomography

  1. Hernandez, J.C.
  2. Hungria, A.B.
  3. Perez-Omil, J.A.
  4. Moreno, M.S.
  5. Coronado, E.A.
  6. Cempura, G.
  7. Kruk, A.
  8. Midgley, P.A.
Journal:
Microscopy and Microanalysis

ISSN: 1431-9276,  1435-8115

Year of publication: 2008

Volume: 14

Issue: SUPPL. 2

Pages: 284-285

Type: Conference paper

DOI: 10.1017/S1431927608087394 GOOGLE SCHOLAR
Data source: Scopus