A methodology for the fabrication by FIB of needle-shape specimens around sub-surface features at the nanometre scale

  1. Hernández-Saz, J.
  2. Herrera, M.
  3. Molina, S.I.
Journal:
Micron

ISSN: 0968-4328

Year of publication: 2012

Volume: 43

Issue: 5

Pages: 643-650

Type: Article

DOI: 10.1016/J.MICRON.2011.11.011 GOOGLE SCHOLAR
Data source: Scopus