A methodology for the fabrication by FIB of needle-shape specimens around sub-surface features at the nanometre scale

  1. Hernández-Saz, J.
  2. Herrera, M.
  3. Molina, S.I.
Aldizkaria:
Micron

ISSN: 0968-4328

Argitalpen urtea: 2012

Alea: 43

Zenbakia: 5

Orrialdeak: 643-650

Mota: Artikulua

DOI: 10.1016/J.MICRON.2011.11.011 GOOGLE SCHOLAR