Impact of silicon incorporation on the formation of structural defects in AlN

  1. Hermann, M.
  2. Furtmayr, F.
  3. Morales, F.M.
  4. Ambacher, O.
  5. Stutzmann, M.
  6. Eickhoff, M.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 2006

Volume: 100

Issue: 11

Type: Article

DOI: 10.1063/1.2363239 GOOGLE SCHOLAR