Impact of silicon incorporation on the formation of structural defects in AlN
- Hermann, M.
- Furtmayr, F.
- Morales, F.M.
- Ambacher, O.
- Stutzmann, M.
- Eickhoff, M.
Journal:
Journal of Applied Physics
ISSN: 0021-8979
Year of publication: 2006
Volume: 100
Issue: 11
Type: Article