Impact of silicon incorporation on the formation of structural defects in AlN
- Hermann, M.
- Furtmayr, F.
- Morales, F.M.
- Ambacher, O.
- Stutzmann, M.
- Eickhoff, M.
Aldizkaria:
Journal of Applied Physics
ISSN: 0021-8979
Argitalpen urtea: 2006
Alea: 100
Zenbakia: 11
Mota: Artikulua